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Abstract: In sub-28-nm nodes, existing optical critical dimension (OCD) metrology tools are challenging to simultaneously and thoroughly meet the metrology requirements of the wafer-level ...
It is recommended to use python 3.12 with a dedicated virtual environment for this package. Learn how to manage python versions and virtual environments. This package is a reader plugin for pynxtools ...
Investigations on AlN/sapphire piezoelectric bilayer structure for high-temperature SAW applications
Abstract: This paper explores the possibility of using AlN/sapphire piezoelectric bilayer structures for high-temperature SAW applications. To determine the temperature stability of AlN, homemade ...
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